Calibration Interferometer

SP 15000 C Series

• Synchronous, continuous
  5 DOF-measurement of length, pitch and yaw angle as well as straightness
• Horizontal and vertical components of axis straightness are measured by a rotatable optics.
• Calibration software according to currently applicable standards
• Easy handling and adjustment by integrated beam direction detection
• Beam deflection with an optional adjustable deflection mirror

Technical Data:

Length measurement

• Measuring range: up to minimum 15 m
• Length resolution: 0.1 nm
• Beam distance: 50 mm

Angle measurement

• Measuring range: up to ±5°
• Angular resolution: < 0.01 arcsec (up to 0.004 arcsec)

Straightness measurement

• Measuring range: ±4 mm
• Resolution: 10 nm
• Axial range (in measuring range freely selectable): < 6.5 m

Applications:

• Calibration of higth-precision axes in measuring and machine tools, as well as coordinate measuring instruments
• Laserinterferometric measurements on guides and translation stages
• Ultraprecise simultaneous length and angle measurements
• Differential measurements

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