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Combined lenght- and angle measurement systems

  • Double-Beam Interferometer
  • Triple-Beam Interferometer

Length and Angle Measurement Systems

Double-Beam Interferometer:

Two parallel measuring beams are used to acquire two length values independently of each other. So it is possible to determine the position, angle and difference values simultaneously.


  • Simultaneous length and angle measurement or differential measurement
  • Beam distance selectable
  • Combinable with plane mirror, cat-eye or hollow reflector

Applications: Simultaneous length and angle measurement, e. g. for verification of linear guides.


Triple-Beam Interferometer (3DOF):

Three laser interferometer included in one unit detect three different length values independently. So it is possible to measure the position and two angles or difference values simultaneously.



  • Simultaneous measurement of length, pitch and yaw angle
  • Straightness measurement on guides and axes with angle test procedure acc. DIN ISO 230-1 in only one step (without any modification)
  • Calibration software for displaying the results
  • Correction of measurement errors according Abbe offset possible
  • Detection of the tilt center position

Applications: Simultaneous measurement of lengths and angles, e. g. survey of axes

for measurement tasks up to 2 m website datasheet icon

for measurement tasks up to minimum 15 m website datasheet icon


Calibration Laser Interferometer (5 DOF):

The triple beam interferometer for large measuring ranges (up to 15 m and more) includes an additional straightness measurement based on the combination of a Wollaston prism and a straightness reflector. Measurements of 5 degrees of freedom are possible.


Product image(s)

Sios Interferometer


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