LM Series

• Ultra-high laser-interferometric precision gauging probes
• Excellent linearity throughout the entire measuring range
• Traceable to national standards

Technical Data:

• Measurement range: 20 mm, 50 mm
• Resolution: 0.1 nm
• Linearity over the entire measuring range: ≤ ±2 nm
• Measuring force, permanently factory preset: 0.5…1.5 N

Applications:

• Precision length gauging probe
• Especially suitable for gauge block calibration
• Calibration of measuring styluses, mandrel gauges, measuring rules, dial gauges and other dimensional standards
• Precision thickness measurement achieved by using two gauging probes for measuring the thicknesses of lenses, wafers and foils