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Gauging Probe

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LM Series

  • Ultra-high laser-interferometric precision gauging probes
  • Excellent linearity throughout the entire measuring range
  • Traceable to national standards

Technical Data:

  • Measurement range: 20 mm, 50 mm
  • Resolution: 0.1 nm
  • Linearity over the entire measuring range: ≤ ±2 nm
  • Measuring force, permanently factory preset: 0.5…1.5 N


  • Precision length gauging probe
  • Especially suitable for gauge block calibration
  • Calibration of measuring styluses, mandrel gauges, measuring rules, dial gauges and other dimensional standards
  • Precision thickness measurement achieved by using two gauging probes for measuring the thicknesses of lenses, wafers and foils website datasheet icon


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Product image(s)

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