Laserinterferometric Vibrometer

The design of these devices is based on the proven concept with our SP-series miniature interferometer. The sensor head of the vibrometer is equipped with additional optics, which enables measurements on surfaces of any roughness.

Benefits:

Displacement measurements in the frequency range 0 – 5 MHz
Measurement through narrow windows are possible
Vibration measurement software for Windows

Applications: High precise measurement of vibrations and length

Nano Vibration Analyzer:

The Nano Vibration Analyzer is a fiber-coupled laserinterferometric vibrometer integrated in a precision technical microscope.

Benefits:

Noncontact vibration measurements on micro objects
Flexible sample positioning
Different changeable objectives
USB-camera for observation of measuring objects

Application: Noncontacting vibration measurements on micro objects, MEMS and cantilevers

NA Series

High precision, noncontact vibration measurements on micro objects
Application-specific configuration
FFT-software for spectrum-analysis

Technical Data:

Measurable frequency range:
0…5 MHz
Amplitude resolution: 20 pm
Scan field range: 50 mm x 50 mm
Microscope magnification: 10x / 50x

Applications:

Noncontacting vibration measurements on micro objects, MEMS and cantilevers
Determining the vibrational spectrum
Determining the vibrational shapes (planar vibrations)
Determining the resonance frequencies
Measurement of the static deflection of membranes and other microstructures