SIOS Messtechniek – Precision in Nano-Metrology

About Us

SIOS Messtechnik GmbH is a leading innovator in laser-interferometric precision instruments for nano-metrology. Based in Ilmenau, Germany, SIOS specializes in designing and manufacturing high-resolution measurement systems that set benchmarks in accuracy and reliability. Our solutions empower industries and research institutions worldwide to achieve unparalleled precision in measurement tasks.

Core Expertise

Length Measurement Systems – Ultra-precise solutions for dimensional control
Combined Length & Angle Measurement Systems – Integrated systems for complex metrology needs
Vibration Measurement Systems – Advanced tools for dynamic analysis
Calibration Rigs & Nano-Measuring Machines – Ensuring traceability and compliance in calibration labs
Frequency-Stabilized HeNe Lasers – Stable laser sources for interferometric applications

Industries We Serve

Engineering & Optics
Semiconductor Manufacturing
Calibration & Metrology Laboratories
Research & Development

Company History

Founded in 1991 by Prof. Jäger and colleagues from the Technical University of Ilmenau, SIOS began as a pioneer in laser interferometry and precision metrology. Initially focused on scientific institutions, the company quickly expanded into industrial applications. In 1993, SIOS moved into its own facility in the Ilmenau Technology Park “Am Vogelherd,” where it continues to operate today. Over the decades, SIOS has introduced groundbreaking innovations such as the NMM-1 Nanomeasuring Machine, recognized as the world’s most accurate positioning system. Close collaboration with leading research institutes like PTB and TU Ilmenau has fueled continuous innovation, earning SIOS multiple Top 100 Innovator awards in Germany. Today, SIOS serves customers in nearly 30 countries, with approximately 50% of sales generated internationally.

Recent Innovations

SIOS continues to push the boundaries of precision measurement technology with several notable advancements:

Triple Beam Laser Interferometer SP 5000 TR – Enables simultaneous measurement of length, pitch, and yaw angles with exceptional accuracy. This innovation reduces measurement uncertainty, improves reproducibility, and significantly speeds up the measuring process, setting new standards in metrology.
SP 15000 NG Extended Range Interferometer – Designed for calibrations and measurements of large positioning units such as CMMs and machine tools, offering unparalleled precision over extended ranges.
Frequency-Stabilized HeNe Laser SL 03 mini – A compact, cost-optimized version of stabilized HeNe lasers for OEM applications, ensuring high wavelength stability for interferometric setups.
Recognition as a Top 100 Innovator (2025) – SIOS was honored for its commitment to innovation through collaborative development with customers and research partners.

Why Choose SIOS?

Unmatched Precision – Achieve nanometer-level accuracy
Flexible Solutions – Tailored systems for unique customer requirements
Global Reach – Trusted by leading organizations in high-tech sectors